//////////////////////////////////////////////////////////// // DEFINE BOOLEAN LAYERS //////////////////////////////////////////////////////////// LAYOUT USE DATABASE PRECISION YES layer nwell 3 layer pwell 2 layer active 1 layer nimplant 4 layer pimplant 5 layer vtg 6 layer vth 7 layer poly 9 layer contact 10 layer metal1 11 layer via1 12 layer metal2 13 layer via2 14 layer metal3 15 layer via3 16 layer metal4 17 layer via4 18 layer metal5 19 layer via5 20 layer metal6 21 layer via6 22 layer metal7 23 layer via7 24 layer metal8 25 layer via8 26 layer metal9 27 layer via9 28 layer metal10 29 well = nwell OR pwell gate = poly AND active implant = nimplant OR pimplant fieldpoly = poly NOT active vt = vtg OR vth contactenc1 = active OR poly contactenc = contactenc1 AND metal1 GROUP mask_check Well.2 Well.4 Poly.1 Poly.2 Poly.3 Poly.4 Poly.5 Poly.6 Active.1 Active.2 Active.3 Active.4 Implant.1 Implant.2 Implant.3 Implant.4 Contact.1 Contact.2 Contact.3 Contact.4 Contact.5 Contact.6 Metal1.1 Metal1.2 Metal1.3 Well.1 { @Nwell and Pwell must not overlap AND nwell pwell } Well.2 { @Min spacing of pwell to nwell = 0.225 EXTERNAL nwell pwell < 0.0225 } Well.4 { @Min width of well = 0.2 INTERNAL well < 0.2 } Poly.1 { @Min width of poly = 0.05 INTERNAL poly < 0.05 } Poly.2 { @Min spacing of gate poly = 0.14 EXTERNAL gate < 0.14 } Poly.3 { @Min extension of poly past active = 0.05 ENCLOSURE active poly < 0.05 } Poly.4 { @Minimum active enclosure of gate = 0.07 ENCLOSURE poly active < 0.07 } Poly.5 { @Minimum spacing of poly to active = 0.05 EXTERNAL poly active < 0.05 } Poly.6 { @Minimum spacing of field poly = 0.075 EXTERNAL fieldpoly < 0.075 } Active.1 { @Minimum width of active = 0.09 INTERNAL active < 0.09 } Active.2 { @Minimum spacing of active areas = 0.08 EXTERNAL active < 0.08 } Active.3 { @Minimum well enclosure of active = 0.055 ENCLOSURE active well < 0.055 } Active.4 { @Active must be inside well NOT active well } Implant.1 { @Minimum spacing of implant to gate = 0.07 EXTERNAL implant gate < 0.07 } Implant.2 { @Minimum spacing of implant to contact = 0.025 EXTERNAL implant contact < 0.025 } Implant.3 { @Minimum spacing of implant = 0.045 EXTERNAL implant < 0.045 } Implant.4 { @Minimum width of implant = 0.045 INTERNAL implant < 0.045 } Implant.6 { @Nimplant and pimplant must not overlap AND nimplant pimplant } Contact.1 { @Minimum width of contact = 0.065 INTERNAL contact < 0.065 } Contact.2 { @Minimum spacing of contact = 0.075 EXTERNAL contact < 0.075 } Contact.3 { @Contact must be inside metal1 and active or poly NOT contact contactenc } Contact.4 { @Minimum active enclosure of contact = 0.005 ENCLOSURE contact active < 0.005 } Contact.5 { @Minimum poly enclosure of contact = 0.005 ENCLOSURE contact poly < 0.005 } Contact.6 { @Minimum spacing of contact to poly = 0.035 EXTERNAL poly contact < 0.035 } Metal1.1 { @Minimum width of metal1 = 0.065 INTERNAL metal1 < 0.065 } Metal1.2 { @Minimum spacing of metal1 = 0.065 EXTERNAL metal1 < 0.065 } Metal1.3 { @Metal1 must extend past contact by 0.035 on two opposite sides RECTANGLE ENCLOSURE contact metal1 GOOD 0.00 0.035 OPPOSITE 0.00 0.035 OPPOSITE } Metal1.4 { @Metal1 must extend past via1 by 0.035 on two opposite sides RECTANGLE ENCLOSURE via1 metal1 GOOD 0.00 0.035 OPPOSITE 0.00 0.035 OPPOSITE } Via1.1 { @Minimum width of via1 = 0.065 INTERNAL via1 < 0.065 } Via1.2 { @Minimum spacing of via1 = 0.075 EXTERNAL via1 < 0.075 } Via1.3 { @Via1 must be inside metal1 NOT via1 metal1 } Via1.4 { @Via1 must be inside metal2 NOT via1 metal2 } Metal2.1 { @Minimum width of metal2 = 0.07 INTERNAL metal2 < 0.07 } Metal2.2 { @Minimum spacing of metal2 = 0.07 EXTERNAL metal2 < 0.07 } Metal2.3 { @Metal2 must extend past via1 by 0.035 on two opposite sides RECTANGLE ENCLOSURE via1 metal2 GOOD 0.00 0.035 OPPOSITE 0.00 0.035 OPPOSITE } Metal2.4 { @Metal2 must extend past via2 by 0.035 on two opposite sides RECTANGLE ENCLOSURE via2 metal2 GOOD 0.00 0.035 OPPOSITE 0.00 0.035 OPPOSITE } Via2.1 { @Minimum width of via2 = 0.07 INTERNAL via2 < 0.065 } Via2.2 { @Minimum spacing of via2 = 0.085 EXTERNAL via2 < 0.075 } Via2.3 { @Via2 must be inside metal2 NOT via2 metal2 } Via2.4 { @Via2 must be inside metal3 NOT via2 metal3 } Metal3.1 { @Minimum width of metal3 = 0.07 INTERNAL metal3 < 0.07 } Metal3.2 { @Minimum spacing of metal3 = 0.07 EXTERNAL metal3 < 0.07 } Metal3.3 { @Metal3 must extend past via2 by 0.035 on two opposite sides RECTANGLE ENCLOSURE via2 metal3 GOOD 0.00 0.035 OPPOSITE 0.00 0.035 OPPOSITE } Metal3.4 { @Metal3 must extend past via3 by 0.035 on two opposite sides RECTANGLE ENCLOSURE via3 metal3 GOOD 0.00 0.035 OPPOSITE 0.00 0.035 OPPOSITE } Via3.1 { @Minimum width of via3 = 0.07 INTERNAL via3 < 0.065 } Via3.2 { @Minimum spacing of via3 = 0.085 EXTERNAL via3 < 0.075 } Via3.3 { @Via3 must be inside metal3 NOT via3 metal3 } Via3.4 { @Via3 must be inside metal4 NOT via3 metal4 } Metal4.1 { @Minimum width of metal4 = 0.14 INTERNAL metal4 < 0.14 } Metal4.2 { @Minimum spacing of metal4 = 0.14 EXTERNAL metal4 < 0.14 } Metal4.3 { @Minimum enclosure of metal4 around via3 ENCLOSURE metal4 via3 < 0.0025 } Via4.1 { @Minimum width of via4 = 0.14 INTERNAL via4 < 0.14 } Via4.2 { @Minimum spacing of via4 = 0.16 EXTERNAL via4 < 0.14 } Via4.3 { @Via4 must be inside metal4 NOT via4 metal4 } Via4.4 { @Via4 must be inside metal5 NOT via4 metal5 } Metal5.1 { @Minimum width of metal5 = 0.14 INTERNAL metal5 < 0.14 } Metal5.2 { @Minimum spacing of metal5 = 0.14 EXTERNAL metal5 < 0.14 } Metal5.3 { @Minimum enclosure of metal5 around via4 ENCLOSURE metal5 via4 < 0.0025 } Via5.1 { @Minimum width of via5 = 0.14 INTERNAL via5 < 0.14 } Via5.2 { @Minimum spacing of via5 = 0.16 EXTERNAL via5 < 0.14 } Via5.3 { @Via5 must be inside metal5 NOT via5 metal5 } Via5.4 { @Via5 must be inside metal6 NOT via5 metal6 } Metal6.1 { @Minimum width of metal6 = 0.14 INTERNAL metal6 < 0.14 } Metal6.2 { @Minimum spacing of metal6 = 0.14 EXTERNAL metal6 < 0.14 } Metal6.3 { @Minimum enclosure of metal6 around via5 ENCLOSURE metal6 via5 < 0.0025 } Via6.1 { @Minimum width of via6 = 0.14 INTERNAL via6 < 0.14 } Via6.2 { @Minimum spacing of via6 = 0.16 EXTERNAL via6 < 0.14 } Via6.3 { @Via6 must be inside metal6 NOT via6 metal6 } Via6.4 { @Via6 must be inside metal7 NOT via6 metal7 } Metal7.1 { @Minimum width of metal7 = 0.4 INTERNAL metal7 < 0.4 } Metal7.2 { @Minimum spacing of metal7 = 0.4 EXTERNAL metal7 < 0.4 } Metal7.3 { @Minimum enclosure of metal7 around via6 ENCLOSURE metal7 via6 < 0.0025 } Via7.1 { @Minimum width of via7 = 0.4 INTERNAL via7 < 0.4 } Via7.2 { @Minimum spacing of via7 = 0.44 EXTERNAL via7 < 0.44 } Via7.3 { @Via7 must be inside metal7 NOT via7 metal7 } Via7.4 { @Via7 must be inside metal8 NOT via7 metal8 } Metal8.1 { @Minimum width of metal8 = 0.4 INTERNAL metal8 < 0.4 } Metal8.2 { @Minimum spacing of metal8 = 0.4 EXTERNAL metal8 < 0.4 } Metal8.3 { @Minimum enclosure of metal8 around via7 ENCLOSURE metal8 via7 < 0.0025 } Via8.1 { @Minimum width of via8 = 0.4 INTERNAL via8 < 0.4 } Via8.2 { @Minimum spacing of via8 = 0.44 EXTERNAL via8 < 0.44 } Via8.3 { @Via8 must be inside metal8 NOT via8 metal8 } Via8.4 { @Via8 must be inside metal9 NOT via8 metal9 } Metal9.1 { @Minimum width of metal9 = 0.8 INTERNAL metal9 < 0.8 } Metal9.2 { @Minimum spacing of metal9 = 0.8 EXTERNAL metal9 < 0.8 } Metal9.3 { @Minimum enclosure of metal9 around via8 ENCLOSURE metal9 via8 < 0.0025 } Via9.1 { @Minimum width of via9 = 0.8 INTERNAL via9 < 0.8 } Via9.2 { @Minimum spacing of via9 = 0.88 EXTERNAL via9 < 0.88 } Via9.3 { @Via9 must be inside metal9 NOT via9 metal9 } Via9.4 { @Via9 must be inside metal10 NOT via9 metal10 } Metal10.1 { @Minimum width of metal10 = 0.8 INTERNAL metal10 < 0.8 } Metal10.2 { @Minimum spacing of metal10 = 0.8 EXTERNAL metal10 < 0.8 } Metal10.3 { @Minimum enclosure of metal10 around via9 ENCLOSURE metal10 via9 < 0.0025 } /////Variable Metal widths L111 = SIZE metal1 BY 0.045 UNDEROVER L112 = AND L111 metal1 L113 = COINCIDENT EDGE metal1 L112 L114 = LENGTH L113 >= 1.3 Metal1.5 { @Minimum spacing of metal1 wider than 0.09 & longer than 0.3 = 0.09 EXTERNAL L114 < 0.09 } L115 = SIZE metal1 BY 0.135 UNDEROVER L116 = AND L115 metal1 L117 = COINCIDENT EDGE metal1 L116 L118 = LENGTH L117 >= 0.9 Metal1.6 { @Minimum spacing of metal1 wider than 0.27 & longer than 0.9 = 0.27 EXTERNAL L118 < 0.27 } L119 = SIZE metal1 BY 0.25 UNDEROVER L120 = AND L119 metal1 L121 = COINCIDENT EDGE metal1 L120 L122 = LENGTH L121 >= 1.8 Metal1.7 { @Minimum spacing of metal1 wider than 0.5 & longer than 1.8 = 0.5 EXTERNAL L122 < 0.5 } L123 = SIZE metal1 BY 0.45 UNDEROVER L124 = AND L123 metal1 L125 = COINCIDENT EDGE metal1 L124 L126 = LENGTH L125 >= 2.7 Metal1.8 { @Minimum spacing of metal1 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L126 < 0.9 } L127 = SIZE metal1 BY 0.75 UNDEROVER L128 = AND L127 metal1 L129 = COINCIDENT EDGE metal1 L128 L130 = LENGTH L129 >= 4.0 Metal1.9 { @Minimum spacing of metal1 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L130 < 1.5 } L211 = SIZE metal2 BY 0.045 UNDEROVER L212 = AND L211 metal2 L213 = COINCIDENT EDGE metal2 L212 L214 = LENGTH L213 >= 0.3 Metal2.5 { @Minimum spacing of metal2 wider than 0.09 & longer than 0.3 = 0.09 EXTERNAL L214 < 0.09 } L215 = SIZE metal2 BY 0.135 UNDEROVER L216 = AND L215 metal2 L217 = COINCIDENT EDGE metal2 L216 L218 = LENGTH L217 >= 0.9 Metal2.6 { @Minimum spacing of metal2 wider than 0.27 & longer than 0.9 = 0.27 EXTERNAL L218 < 0.27 } L219 = SIZE metal2 BY 0.25 UNDEROVER L220 = AND L219 metal2 L221 = COINCIDENT EDGE metal2 L220 L222 = LENGTH L221 >= 1.8 Metal2.7 { @Minimum spacing of metal2 wider than 0.5 & longer than 1.8 = 0.5 EXTERNAL L222 < 0.5 } L223 = SIZE metal2 BY 0.45 UNDEROVER L224 = AND L223 metal2 L225 = COINCIDENT EDGE metal2 L224 L226 = LENGTH L225 >= 2.7 Metal2.8 { @Minimum spacing of metal2 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L226 < 0.9 } L227 = SIZE metal2 BY 0.75 UNDEROVER L228 = AND L227 metal2 L229 = COINCIDENT EDGE metal2 L228 L230 = LENGTH L229 >= 4.0 Metal2.9 { @Minimum spacing of metal2 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L230 < 1.5 } L311 = SIZE metal3 BY 0.045 UNDEROVER L312 = AND L311 metal3 L313 = COINCIDENT EDGE metal3 L312 L314 = LENGTH L313 >= 0.3 Metal3.5 { @Minimum spacing of metal3 wider than 0.09 & longer than 0.3 = 0.09 EXTERNAL L314 < 0.09 } L315 = SIZE metal3 BY 0.135 UNDEROVER L316 = AND L315 metal3 L317 = COINCIDENT EDGE metal3 L316 L318 = LENGTH L317 >= 0.9 Metal3.6 { @Minimum spacing of metal3 wider than 0.27 & longer than 0.9 = 0.27 EXTERNAL L318 < 0.27 } L319 = SIZE metal3 BY 0.25 UNDEROVER L320 = AND L319 metal3 L321 = COINCIDENT EDGE metal3 L320 L322 = LENGTH L321 >= 1.8 Metal3.7 { @Minimum spacing of metal3 wider than 0.5 & longer than 1.8 = 0.5 EXTERNAL L322 < 0.5 } L323 = SIZE metal3 BY 0.45 UNDEROVER L324 = AND L323 metal3 L325 = COINCIDENT EDGE metal3 L324 L326 = LENGTH L325 >= 2.7 Metal3.8 { @Minimum spacing of metal3 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L326 < 0.9 } L327 = SIZE metal3 BY 0.75 UNDEROVER L328 = AND L327 metal3 L329 = COINCIDENT EDGE metal3 L328 L330 = LENGTH L329 >= 4.0 Metal3.9 { @Minimum spacing of metal3 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L330 < 1.5 } L415 = SIZE metal4 BY 0.135 UNDEROVER L416 = AND L415 metal4 L417 = COINCIDENT EDGE metal4 L416 L418 = LENGTH L417 >= 0.9 Metal4.5 { @Minimum spacing of metal4 wider than 0.27 & longer than 0.9 = 0.27 EXTERNAL L418 < 0.27 } L419 = SIZE metal4 BY 0.25 UNDEROVER L420 = AND L419 metal4 L421 = COINCIDENT EDGE metal4 L420 L422 = LENGTH L421 >= 1.8 Metal4.6 { @Minimum spacing of metal4 wider than 0.5 & longer than 1.8 = 0.5 EXTERNAL L422 < 0.5 } L423 = SIZE metal4 BY 0.45 UNDEROVER L424 = AND L423 metal4 L425 = COINCIDENT EDGE metal4 L424 L426 = LENGTH L425 >= 2.7 Metal4.7 { @Minimum spacing of metal4 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L426 < 0.9 } L427 = SIZE metal4 BY 0.75 UNDEROVER L428 = AND L427 metal4 L429 = COINCIDENT EDGE metal4 L428 L430 = LENGTH L429 >= 4.0 Metal4.8 { @Minimum spacing of metal4 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L430 < 1.5 } L515 = SIZE metal5 BY 0.135 UNDEROVER L516 = AND L515 metal5 L517 = COINCIDENT EDGE metal5 L516 L518 = LENGTH L517 >= 0.9 Metal5.5 { @Minimum spacing of metal5 wider than 0.27 & longer than 0.9 = 0.27 EXTERNAL L518 < 0.27 } L519 = SIZE metal5 BY 0.25 UNDEROVER L520 = AND L519 metal5 L521 = COINCIDENT EDGE metal5 L520 L522 = LENGTH L521 >= 1.8 Metal5.6 { @Minimum spacing of metal5 wider than 0.5 & longer than 1.8 = 0.5 EXTERNAL L522 < 0.5 } L523 = SIZE metal5 BY 0.45 UNDEROVER L524 = AND L523 metal5 L525 = COINCIDENT EDGE metal5 L524 L526 = LENGTH L525 >= 2.7 Metal5.7 { @Minimum spacing of metal5 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L526 < 0.9 } L527 = SIZE metal5 BY 0.75 UNDEROVER L528 = AND L527 metal5 L529 = COINCIDENT EDGE metal5 L528 L530 = LENGTH L529 >= 4.0 Metal5.8 { @Minimum spacing of metal5 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L530 < 1.5 } L615 = SIZE metal6 BY 0.135 UNDEROVER L616 = AND L615 metal6 L617 = COINCIDENT EDGE metal6 L616 L618 = LENGTH L617 >= 0.9 Metal6.5 { @Minimum spacing of metal6 wider than 0.27 & longer than 0.9 = 0.27 EXTERNAL L618 < 0.27 } L619 = SIZE metal6 BY 0.25 UNDEROVER L620 = AND L619 metal6 L621 = COINCIDENT EDGE metal6 L620 L622 = LENGTH L621 >= 1.8 Metal6.6 { @Minimum spacing of metal6 wider than 0.5 & longer than 1.8 = 0.5 EXTERNAL L622 < 0.5 } L623 = SIZE metal6 BY 0.45 UNDEROVER L624 = AND L623 metal6 L625 = COINCIDENT EDGE metal6 L624 L626 = LENGTH L625 >= 2.7 Metal6.7 { @Minimum spacing of metal6 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L626 < 0.9 } L627 = SIZE metal6 BY 0.75 UNDEROVER L628 = AND L627 metal6 L629 = COINCIDENT EDGE metal6 L628 L630 = LENGTH L629 >= 4.0 Metal6.8 { @Minimum spacing of metal6 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L630 < 1.5 } L719 = SIZE metal7 BY 0.25 UNDEROVER L720 = AND L719 metal7 L721 = COINCIDENT EDGE metal7 L720 L722 = LENGTH L721 >= 1.8 Metal7.5 { @Minimum spacing of metal7 wider than 0.5 & longer than 1.8 = 0.5 EXTERNAL L722 < 0.5 } L723 = SIZE metal7 BY 0.45 UNDEROVER L724 = AND L723 metal7 L725 = COINCIDENT EDGE metal7 L724 L726 = LENGTH L725 >= 2.7 Metal7.6 { @Minimum spacing of metal7 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L726 < 0.9 } L727 = SIZE metal7 BY 0.75 UNDEROVER L728 = AND L727 metal7 L729 = COINCIDENT EDGE metal7 L728 L730 = LENGTH L729 >= 4.0 Metal7.7 { @Minimum spacing of metal7 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L730 < 1.5 } L819 = SIZE metal8 BY 0.25 UNDEROVER L820 = AND L819 metal8 L821 = COINCIDENT EDGE metal8 L820 L822 = LENGTH L821 >= 1.8 Metal8.5 { @Minimum spacing of metal8 wider than 0.5 & longer than 1.8 = 0.5 EXTERNAL L822 < 0.5 } L823 = SIZE metal8 BY 0.45 UNDEROVER L824 = AND L823 metal8 L825 = COINCIDENT EDGE metal8 L824 L826 = LENGTH L825 >= 2.7 Metal8.6 { @Minimum spacing of metal8 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L826 < 0.9 } L827 = SIZE metal8 BY 0.75 UNDEROVER L828 = AND L827 metal8 L829 = COINCIDENT EDGE metal8 L828 L830 = LENGTH L829 >= 4.0 Metal8.7 { @Minimum spacing of metal8 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L830 < 1.5 } L923 = SIZE metal9 BY 0.45 UNDEROVER L924 = AND L923 metal9 L925 = COINCIDENT EDGE metal9 L924 L926 = LENGTH L925 >= 2.7 Metal9.5 { @Minimum spacing of metal9 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L926 < 0.9 } L927 = SIZE metal9 BY 0.75 UNDEROVER L928 = AND L927 metal9 L929 = COINCIDENT EDGE metal9 L928 L930 = LENGTH L929 >= 4.0 Metal9.6 { @Minimum spacing of metal9 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L930 < 1.5 } L1023 = SIZE metal10 BY 0.45 UNDEROVER L1024 = AND L1023 metal10 L1025 = COINCIDENT EDGE metal10 L1024 L1026 = LENGTH L1025 >= 2.7 Metal10.5 { @Minimum spacing of metal10 wider than 0.9 & longer than 2.7 = 0.9 EXTERNAL L1026 < 0.9 } L1027 = SIZE metal10 BY 0.75 UNDEROVER L1028 = AND L1027 metal10 L1029 = COINCIDENT EDGE metal10 L1028 L1030 = LENGTH L1029 >= 4.0 Metal10.6 { @Minimum spacing of metal10 wider than 1.5 & longer than 4.0 = 1.5 EXTERNAL L1030 < 1.5 } Grid.1 { @All shapes must be on a 2.5 nm grid OFFGRID active 5 5 } Grid.2 { @All shapes must be on a 2.5 nm grid OFFGRID implant 5 5 } Grid.3 { @All shapes must be on a 2.5 nm grid OFFGRID well 5 5 } Grid.4 { @All shapes must be on a 2.5 nm grid OFFGRID contact 5 5 } Grid.5 { @All shapes must be on a 2.5 nm grid OFFGRID poly 5 5 } Grid.6 { @All shapes must be on a 2.5 nm grid OFFGRID metal1 5 5 } Grid.7 { @All shapes must be on a 2.5 nm grid OFFGRID via1 5 5 } Grid.8 { @All shapes must be on a 2.5 nm grid OFFGRID metal2 5 5 } Grid.9 { @All shapes must be on a 2.5 nm grid OFFGRID via2 5 5 } Grid.10 { @All shapes must be on a 2.5 nm grid OFFGRID metal3 5 5 } Grid.11 { @All shapes must be on a 2.5 nm grid OFFGRID via3 5 5 } Grid.12 { @All shapes must be on a 2.5 nm grid OFFGRID metal4 5 5 } Grid.13 { @All shapes must be on a 2.5 nm grid OFFGRID via4 5 5 } Grid.14 { @All shapes must be on a 2.5 nm grid OFFGRID metal5 5 5 } Grid.15 { @All shapes must be on a 2.5 nm grid OFFGRID via5 5 5 } Grid.16 { @All shapes must be on a 2.5 nm grid OFFGRID metal6 5 5 } Grid.17 { @All shapes must be on a 2.5 nm grid OFFGRID via6 5 5 } Grid.18 { @All shapes must be on a 2.5 nm grid OFFGRID metal7 5 5 } Grid.19 { @All shapes must be on a 2.5 nm grid OFFGRID via7 5 5 } Grid.20 { @All shapes must be on a 2.5 nm grid OFFGRID metal8 5 5 } Grid.21 { @All shapes must be on a 2.5 nm grid OFFGRID via8 5 5 } Grid.22 { @All shapes must be on a 2.5 nm grid OFFGRID metal9 5 5 } Grid.23 { @All shapes must be on a 2.5 nm grid OFFGRID via9 5 5 } Grid.24 { @All shapes must be on a 2.5 nm grid OFFGRID metal10 5 5 } Grid.25 { @All shapes must be on a 2.5 nm grid OFFGRID vtg 5 5 } Grid.26 { @All shapes must be on a 2.5 nm grid OFFGRID vth 5 5 }